Measuring Equipment

Customized solutions for the quality inspection of semiconductors

Automatic measuring machines or test systems are used to check the quality of produced power semiconductors or diodes as well as for the fully automatic execution of complex measuring tasks. MRS offers a variety of different test systems with which electrical modules, components and machines can be tested and measured for current flow and voltage. The services include both the individual development of systems according to customer requirements as well as the worldwide installation of the finished systems on site.

Power Semiconductor Testers

Whether large automated test systems integrated in the production line or small systems for small series or small parts for the desk. Depending on size or functional requirements, MRS creates individual test systems also with mechanical marking, laser marking or with inkjet marking.

What is tested?

  • IGBT modules, FET modules, diodes
  • Chips made of Si, SiC and GaN
  • And much more
Key data:
  • -100V to +100V at max. +/- 100mA
  • -2000V to +2000V at max. +/-10mA
  • currents up to max. 1000A uni/bidirectional
  • Leakage currents in 10µA measuring range (resolution 0.33nA)
  • Multiplexer via HV/high current relay according to customer requirements

Testers for Different Requirements

The more extensive and complex the production plant, the more demanding are the requirements for today's test systems. MRS offers its customers test systems for various fields of application, always with the option of individual customization.

Test Systems

Measure all diode-parameters including Power
  • Vz temp. compensated
  • IR / DIR temp. compensated
  • Vf (mA)
  • Vf (Power)
  • dVf (ZHT)
  • Temperature
  • …
Handling system
  • Bunker
  • Feeder
  • Headwire straightener station
  • Cutting station
  • Measuring of cutting length
  • Measuring station
  • Marking station
  • Good / waste sorting
  • …

Measure all parameters of the Power-diodes in a halfbridge/rectifier
  • Vz temp. compensated
  • IR / DIR (with leakage current compensation)
  • Vf (mA)
  • Chipfactor
  • dVf (Loading)
  • Temperature
  • …
Handling system - Full automatic station or manual draw-stations
  • With exchangeable adapter-system
  • marking
  • Good/waste differentiation
  • Waste Box with Sensor
  • …

Measure all parameters of the FET’s on the module (up to 1000A)
  • VSD diode
  • BVDSS
  • VDS
  • IDSS (forward/reverse) with leakage current compensation
  • DIDSS (forward/reverse) with leakage current compensation
  • IGSS / DIGSS
  • VGSTH
  • RDSON
  • ZTH, ZTH loop
  • C-Capacitor
  • R-Resistor
  • R-Shunt
  • Temperature
  • …
Integrated Avalanche-tests (Avalanche test with VBAT max. 90VDC) Full integration in an full automatic handling system

Measure all parameters of the IGBT’s on the module (up to 1000A)
  • VSD diode
  • VCE, VCESAT
  • ICES (forward/reverse) with leakage current compensation
  • DICES (forward/reverse) with leakage current compensation
  • IGES / DIGES
  • VGSTH
  • ZTH, ZTH loop
  • C-Capacitor
  • R-Resistor
  • R-Shunt
  • Temperature
  • …
Full integration in an full automatic handling system

RBSOA / SCSOA Testing Depending on the quality standards during the production of different IGBT and MOSFET module types a RBSOA and  SCSOA test is performed. The range of systems last from stand-alone laboratory systems with manual feeding to valuate DUTs during the developing process to full automated shift operation production lines. For RBSOA and SCSOA tests it is essential that the DUT undergoes a real stress test during switching and not just turning on and off the DUT. To reach a real stress test several criteria must be fulfilled like
  • A very low stray induction of the complete system otherwise it will be just switching without real stressing during switching
  • Accurate data logging with the highest possible resolution for analyzing the measuring results like
    • du / dt value
    • di / dt value
    • switching times
    • clamping voltage
    • peak voltages
    • collector current
    • gate voltage
  • Complete traceability of each DUT for later analysis saving the measuring data in databases with upload to the company network if necessary.
  • Example contact unit 1200 V / 2000 A RBSOA & 1200 V / 8000 A SCSOA with short circuit detection option
  • In a full-automated shift operation production line
Advantages:
  • Measuring equipment adapted for each product to get the highest possible resolution
  • Customized DC Link for each DUT to minimize ESL
  • Individual Gatedrive stage
  • Contact check unit to ensure the DUT is connected proper before applying high voltage
  • Signal Multiplexer for DUTs in half bridge configuration to save money and space instead of using a second oscilloscope
  • Short circuit detection option to prevent uncontrolled discharging of the DC Link into the system during a DUT failure preventing welding the DUT to needles and unnecessary maintenance work at a contact unit.

For the High Temperature Reverse Bias tester we have developed a very compact test system. The system is capable to test 4x DUTs with up to +/-6500 V and 200 °C. The system consist of the following:
  • Industrial PC to control the system and log the data.
  • Test system works 72h PC Independent (in case of PC-shutdown).
  • The high voltage power supplies.
  • A standard meter to monitor the current and voltage.
  • A special developed safety system.
  • 4x temperature regulators.
  • Separate heating and cooling for the 4x DUTs.

Laboratory Test-System 300A to measure all parameters of a FET or FET-modules
  • VSD diode
  • BVDSS
  • IDSS (forward/reverse) with leakage current compensation
  • DIDSS (forward/reverse) with leakage current compensation
  • IGSS / DIGSS
  • VGSTH
  • RDSON
  • ZTH, ZTH loop
  • C-Capacitor
  • R-Resistor
  • R-Shunt
  • …
Including a manual contacting-station.

For a continuous quality control during the production of different electronic semiconductors HTOL Tests are performed. The DUTs are cycled for a specific time (100h -1000h) most of the time under high temperature in a heating chamber. Different JEDEC standards define the individual test for each DUT which is interpreted by  the hardware and software. The complete test will be interpreted by analysis tools. The system consist of the following:
  • Industrial PC to control the system and log the data
  • The high power supplies
  • A standard Oscilloscope to monitor the current and voltage
  • Multiplexer to switch each DUT to the Scope for V-measurement
  • Current-limitation for each DUT
  • Separate contacting for the 80 DUTs placed into a heating chamber up to 260°C

For a continuous quality control during the production of different electronic semiconductors thermal cycling tests are performed. During this test electronic semiconductors are heated up due current pulses with a given frequency. In this example 16 rectifier diodes are pulsed with a current up to 200A at the same time. The forward voltage is measured continuously until the voltage drops below a given value which stands for the temperature inside the rectifier diode. Afterwards the rectifier diode is cooled down to a given forward voltage start value and repeats the test. This long-time tests are running more than 500hours which makes a very stable system essential. In this example there are 16 unique test positions which can run independent.   Advantages:
  • Individual voltage and current classification depending on the customers specification.
  • cycle patterns are programmable by the customer.
  • contact units are designed individual for each product to test.

Current Cycling tests up to 300 A
  • Parameter-tests are possible
  • DVf-measurement
  • Test-time up to 1000 hour
  • Chiller for water-cooling
  • 10 heatsinks (water-cooled) for 10 Halfbridge-DUT’s
  • 10 Type-K temperature measuring points
The DUT’s are mounted on water-cooled heatsinks. The DUT is powered with high current pulses up to a specified temperature. Is this temperature reached, the switch field select the next DUT and heat it up. After one cycle the temperature of the first DUT is measured and if the temperature is still too high, the DUT will be skipped. The Chiller and the heatsinks are chosen that after one cycle the first part is nearly back on his start-temperature and can be remeasured.

Low volume Production Line ZTH Test-System 150 A     and all parameters of a FET or FET-modules
  • VSD diode
  • BVDSS
  • IDSS (forward/reverse) with leakage current compensation
  • DIDSS (forward/reverse) with leakage current compensation
  • IGSS / DIGSS
  • VGSTH
  • RDSON
  • ZTH, ZTH loop
  • C-Capacitor
  • R-Resistor
  • R-Shunt
  • …
Including a manual contacting-station.

All set point and measuring functions are based upon the measuring module. For calibration, this module is just measured with a suitable instrument, and the result is sent to the tester and stored in non-volatile memory. There are especially no potentiometers involved in calibration. We provide a tool for automatic calibration, based on a calibrated digital multimeter and additional circuitry to cover all measuring ranges. This tool enables especially our international customers to calibrate by themselves or to check the tester’s DC specification periodically. The system generates a calibration report automatically with the comparison of tester and multimeter results.

Advantages of the MRS Test Systems

Knowhow and Experience

MRS has decades of experience in testing power semiconductors.

Individual Test Systems

Because all components of MRS systems are modular, individual systems can be created flexibly and according to customer requirements.

Worldwide Test Systems

Long-term cooperation with worldwide renowned customers from a wide range of industries.

Made in Germany

Modern manufacturing technologies as well as recognized quality standards - MRS develops and produces in Germany.

Machinery Directive

The test systems comply with the CE standard and are built under specification of Machinery Directive 2006 / 42 / EG: DIN EN 60204, DIN EN ISO 12100, DIN EN ISO 13849

Machinery Directive

The test systems comply with the CE standard and are built under specification of Machinery Directive 2006 / 42 / EG: DIN EN 60204, DIN EN ISO 12100, DIN EN ISO 13849

Machinery Directive

The test systems comply with the CE standard and are built under specification of Machinery Directive 2006 / 42 / EG: DIN EN 60204, DIN EN ISO 12100, DIN EN ISO 13849

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Or are you looking for a specific test system? Give us a call or send us an email for more information!

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